Abstract:Following the fast and advanced development of technologies worldwide in the early 1970s, especially focusing on industry and academic applications, research on spectroscopic ellipsometry (SE) has been significantly per-formed in many universities and institutes in China, which is a typical developing country. Through strong in-ternational cooperation, various SE configurations have been proposed and achieved in real and practical applications. Improvements in SE instrumentation have been stimulated and approached in the broad spectral region, providing powerful tools to study the optical properties of materials and micro/nanostructures under variable experimental conditions. Thus, a brief review of the historical research and development of SE in China is presented, and future challenges are discussed.

Research on Spectroscopic Ellipsometry in China with Future Challenges