Abstract:A high-resolution and high-linearity surface acoustic wave (SAW) temperature sensor, consisting of a SAW resonator device fabricated on novel X-cut LiNbO3/SiO2/Si piezoelectric substrate and a resonance frequency readout chip using standard 180 nm CMOS technology, is presented for the first time. High temperature performance substrate LiNbO3/SiO2/Si is prepared mainly by ion implantation and wafer bonding at first. RF SAW device with resonance frequency near 900 MHz is designed and fabricated on the substrate. Traditional probe method using network analyzer and the readout chip method are both implemented to characterize the fabricated SAW device. Further measurement of temperature using resonance frequency shift of SAW device demonstrates the feasibility of the combined system as a portable SAW temperature sensor. The obtained frequency-temperature relation of the fabricated device is almost linear. The frequency resolution of the readout chip is 733 Hz and the corresponding temperature accuracy is 0.016 degrees C. Resolution of the sensor in this work is superior to most of the commercial temperature measurement sensors. Theory analysis and finite element simulation are also presented to prove the mechanism and validity of using SAW device for temperature detection applications. We conclude that the high-linearity frequency-temperature relation is achieved by the offset between high-order coefficients of LiNbO3 and SiO2 with opposite signs. This work offers the possibility of temperature measuring in ultra-high precision sensing and control applications. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license

Bulk GaN-based SAW Resonators with High Quality Factors for Wireless Temperature Sensor

Geometry Characteristics and Wide Temperature Behavior of Silicon-Based GaN Surface Acoustic Wave Resonators with Ultrahigh Quality Factor

Comparative Study of SAW Temperature Sensor Based on Different Piezoelectric Materials and Crystal Cuts for Passive Wireless Measurement

Elastic Strain Engineered Nanomechanical GaN Resonators with Thermoelastic Dissipation Dilution Up to 600 K

AlN/6H-SiC SAW resonator for high temperature wireless SAW sensor

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System

A High Sensitivity Temperature Sensor Using High-<i>Q</i> NS-SAW Resonator

High-resolution, high-linearity temperature sensor using surface acoustic wave device based on LiNbO3/SiO2/Si substrate

High Temperature Surface Acoustic Wave Sensor with Strain Isolation Structure

Development of Temperature Sensor Based on AlN/ScAlN SAW Resonators

Development of Wireless and Passive SAW Temperature Sensor with Very High Accuracy

A Mass Sensor with High Sensitivity Based on Thin Film Bulk Acoustic Resonators

Metal-Free High-Overtone Bulk Acoustic Resonators With Outstanding Acoustic Match and Thermal Stability

High Quality Factor Surface Fabry-Perot Cavity of Acoustic Waves

Design and Fabrication of an Surface Acoustic Wave Resonator Based on AlN/4H-SiC Material for Harsh Environments

Transverse Spurious Mode Free SAW Resonators and Delay Line on GaN/Si with High Quality Factor

Strain-enhanced high Q -factor GaN micro-electromechanical resonator.

Strain-enhanced high<i>Q</i>-factor GaN micro-electromechanical resonator

LiNbO3-Based SAW Sensors Capable to Measure Up to 1100°C High Temperature

Ultra-High Frequency Surface Acoustic Wave Sensors for Temperature Detection