Abstract:The prospect of employing nanophotonic methods for controlling photon–electron interactions has ignited substantial interest within the particle accelerator community. Silicon-based integrated dielectric laser acceleration (DLA) has emerged as a viable option by leveraging localized photonic effects to emit, accelerate, and measure electron bunches using exclusively light. Here, using highly regular nanopatterning over large areas while preserving the crystalline structure of silicon is imperative to enhance the efficiency and yield of photon-electron effects. While several established fabrication techniques may be used to produce the required silicon nanostructures, alternative techniques are beneficial to enhance scalability, simplicity and cost-efficiency. In this study, we demonstrate the nano-synthesis of silicon structures over arbitrarily large areas utilizing exclusively deep ultraviolet (DUV) ultrafast laser excitation. This approach delivers highly concentrated electromagnetic energy to the material, thus producing nanostructures with features well beyond the diffraction limit. At the core of our demonstration is the production of silicon laser-induced surface structures with an exceptionally high aspect-ratio -reaching a height of more than 100 nm- for a nanostructure periodicity of 250 nm. This result is attained by exploiting a positive feedback effect on the locally enhanced laser electric field as the surface morphology dynamically emerges, in combination with the material properties at DUV wavelengths. We also observe strong nanopattern hybridization yielding intricate 2D structural features as the onset of amorphization takes place at high laser pulse fluence. This technique offers a simple, yet efficient and attractive approach to produce highly uniform and high aspect ratio silicon nanostructures in the 200–300 nm range.

Nanochannels with a 18-Nm Feature Size and Ultrahigh Aspect Ratio on Silica Through Surface Assisting Material Ejection

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

Laser Fabrication of Nanoholes on Silica Through Surface Window Assisted Nano-Drilling (SWAN)

Laser microstructuring of Si surfaces for low-threshold field-electron emission

Hybrid micro/nano-structure formation by angular laser texturing of Si surface for surface enhanced Raman scattering.

Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

Nano-ablation of Silica by Plasmonic Surface Wave at Low Fluence.

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Ultrafast laser direct drilling of high aspect ratio microchannels in fused silica: Insights on channel self-termination mechanisms

Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching

Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

Dual-control of incubation effect for efficiently fabricating surface structures in fused silica

Nanofabrication mechanism of λ/20 features achieved by coupling field tip enhancement induced with nanosecond laser irradiating AFM probe tip

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

Engraving Depth‐Controlled Nanohole Arrays on Fused Silica by Direct Short‐Pulse Laser Ablation

Fabrication of Nanostructures by Laser Optical Focusing