A Miniature All-optical Dual-resonance Photoacoustic Sensor for Trace Gas Measuring

Guojie Wu,Zhenfeng Gong,Haie Li,Junsheng Ma,Liang Mei
DOI: https://doi.org/10.1109/icait56197.2022.9862800
2022-01-01
Abstract:In this paper, a miniature all-optical dual-resonance photoacoustic (PA) sensor is demonstrated. This sensor consists of a small size resonant T-type PA cell together with an integrated sensor probe with a silicon cantilever beam. With the average time of 1 s, the minimum detection limit is tested to be 1.2 parts-per-million. Therefore, we believe that the reported sensor can be suitable for high-sensitivity measurements of trace gases in sub-cubic centimeter-scale spaces.
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