Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

A Dual-Drive Mode MEMS Device for In-Situ Static/dynamic Electro-Mechanical Characterization of Nanomaterials

MEMS Device for Quantitative in Situ Mechanical Testing in Electron Microscope

Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing

Mechanical Characterization Device For In Situ Measurement Of Nanomechanical Properties Of Micro/Nanostructures

MEMS based nanomechanical testing method with independent electronic sensing of stress and strain

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

In Situ Device-Level TEM Characterization Based on Ultra-Flexible Multilayer MoS2 Micro-Cantilever

Single nano line in-situ mechanics all-round property testing device in scanning electron microscope

DETERMINATION OF MECHANICAL BEHAVIOR OF MEMS MATERIALS

In Situ Mechanical Testing of Templated Carbon Nanotubes

Measurement of mechanical properties of one-dimensional nanostructures with combined multi-probe platform

Apparatus and method for measuring electro-mechanical property and microstructure of nano material in stress condition

An Instrument for Measuring Mechanical Properties of MEMS Materials by Nanoindentation and Micro-Beam-Bending

A MEMS dynamic mechanical analyzer for in situ viscoelastic characterization of 3D printed nanostructures

In situ nanomechanical measurement of Cu nanowires

Integrated Uniaxial Tensile Test System for Measuring Mechanical Properties of MEMS Materials

Transmission electron microscope nanometer line in situ compressing electromechanical property test device

On-chip testing method for measurements of friction and wear in moveable MEMS devices

Note: Mechanical and Electrical Characterization of Nanowires in Scanning Electron Microscope.

Mems/Nems Mechanical Characterization on Different Thin - Film Materials by Scanning along Micro-Machined Cantilevers

Force and electrical behavior testing device under Nanometer lines in-situ compressing in transmission electron microscope