Enhanced Mechanical Properties of CrN Coatings by Plasma Immersion Ion Implantation and Deposition

Liangliang Liu,Tijun Li,Qingdong Ruan,Dan Li,Chao Huang,Xiaolin Zhang,Yinghe Ma,Yuzheng Wu,Zhongcan Wu,Ricky K. Y. Fu,Zhongzhen Wu,Paul K. Chu

DOI: https://doi.org/10.1016/j.ceramint.2022.10.215

IF: 5.532

2023-01-01

Ceramics International

Abstract:Crystal defects can enhance the properties of materials without changing the composition but introduction of high-density defects in coatings is challenging. Herein, plasma immersion ion implantation and deposition (PIII&D) is employed to produce high-density crystal defects in CrN coatings to improve the mechanical properties. PIII&D is demonstrated to introduce high-density point defects and stacking faults into the CrN coatings, especially at a bias exceeding 10 kV. The dislocation density significantly increased from 5.2 x 1014/m2 to 1.3 x 1017/m2. In addition, the covered area of defects increased from 30% to 75% with the ion implantation. As a result, the hardness increases significantly from 24.2 GPa to 35.6 GPa, while the fracture toughness is not compromised.