Ultrahigh-Q Packaged Silica Microrod Cavity for Microcomb Generation

Wen Chen,Lu Yao,Chang Li,Hao-Jing Chen,Daquan Yang,Yun-Feng Xiao

DOI: https://doi.org/10.1364/cleo_si.2022.sth2f.4

2022-01-01

Abstract:A packaged silica microrod cavity with greater than one billion Q factor is demonstrated. Based on this packaged device, a single soliton microcomb with repetition rate of 24 GHz is generated.

What problem does this paper attempt to address?

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

J. Lin,W. Fang,Y. Cheng,S. J. Yu,Y. G. Ma,F. He,L. Qiao,L. Tong,Z. Xu

DOI: https://doi.org/10.1364/cleo_at.2012.cth5c.9

2012-01-01

Abstract:We report on fabrication of ultra-high-Q (~106) whispering gallery microcavities on a fused silica chip using a femtosecond laser, enabled by the high spatial resolution and three-dimensional nature of femtosecond laser direct writing.
Fabrication of Optical Cavities with Femtosecond Laser Pulses

Jintian Lin,Jiangxin Song,Jialei Tang,Wei Fang,Koji Sugioka,Ya Cheng

DOI: https://doi.org/10.1117/12.2041353

2014-01-01

Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.
Single soliton microcombs based on optimized ultra-high Q Si3N4 optical microcavities

Qingsong Bai

DOI: https://doi.org/10.1117/1.oe.63.3.034108

IF: 1.3

2024-03-29

Optical Engineering

Abstract:On-chip Si3N4 microcavities composed of multi-mode waveguides can achieve high-quality factor and anomalous dispersion simultaneously, which is necessary for solitons generation. It has been proven to be a promising platform for compact optical (Kerr) frequency comb generation. To further reduce the threshold power for generating a single soliton microcomb, a racetrack Si3N4 microcavity with Euler bends is reported. Compared with traditional racetrack microcavities, Euler bending can significantly suppress the sudden change in bending radius at the waveguide connection, which suppresses mode interactions and reduces propagation losses, resulting in an increase in Q factor value. Based on this racetrack microcavity, using the auxiliary laser heating method, a single soliton frequency comb with a repetition rate of 34 GHz and a 3 dB bandwidth exceeding 18 nm (corresponding to a pulse duration of 143 fs) can be generated using only a 19 mW pump laser (estimated on-chip pump power below 10 mW). The optimized racetrack microcavities can be building blocks for integrated photonics systems.

optics
Integrated Ultra-High-Q Optical Resonator

Ki Youl Yang,Dong Yoon Oh,Jun Young Lee,Qi‐Fan Yang,Yonggang Xu,Kerry J. Vahala

2017-01-01

Abstract:Optical microcavities are essential in numerous technologies and scientific disciplines. However, their application in many areas relies exclusively upon discrete microcavities in order to satisfy challenging combinations of ultra-low-loss performance (high cavity-Q-factor) and cavity design requirements. Indeed, finding a microfabrication bridge connecting ultra-high-Q device functions with micro and nanophotonic circuits has been a long-term priority of the microcavity field. Here, an integrated ridge resonator having a record Q factor over 200 million is presented. Its ultra-low-loss and flexible cavity design brings performance that has been the exclusive domain of discrete silica and crytalline microcavity devices to integrated systems. Two distinctly different devices are demonstrated: soliton sources with electronic repetition rates and high-coherence Brillouin lasers. This multi-device capability and performance from a single integrated cavity platform represents a critical advance for future nanophotonic circuits and systems.
Octave-spanning Soliton Microcomb in Silica Microdisk Resonators

Jiaxin Gu,Xuan LI,Kai Qi,Keren Pu,Zhixuan LI,Fan Zhang,Tao LI,Zhenda Xie,Min Xiao,Xiaoshun Jiang

DOI: https://doi.org/10.1364/ol.479251

IF: 3.6

2023-01-01

Optics Letters

Abstract:We demonstrate a chip-based octave-spanning soliton microcomb in a whispering gallery mode microresonator platform. By fabricating a silica microdisk resonator and optimizing its dispersion with dry etching, we achieve an octave-spanning single-soliton microcomb with a repetition rate of ∼670 GHz at an optical pump power of 162.6 mW. Also, two dispersive waves at the end of the spectrum are observed to extend the comb spectral range and improve the comb power.
Robust Packaged Fiber-Microcavity Device with over One Billion Q-factor

Fangxing Zhang,Shengnan HuangFu,Jialve Sun,Shengqiang Ji,Yanjie Bai,Yunfeng Xiao

2023-03-19

Abstract:Whispering gallery mode (WGM) microcavities can confine photons within a microscale volume for long periods of time, strongly enhancing light-matter interactions, and making it a crucial platform in optical science and applications. Current research on microcavity coupling system relays on precise mechanical coupling with microscope monitoring, and its resonance properties are extremely sensitive to external interference, which greatly limits the practical application of microcavities. Therefore, a novel packaged fiber-microcavity device with air/water tightness and stable temperature characteristics is proposed in this paper. A variety of fixatives with different Young's modulus gradients and low coefficients of thermal expansion are used to design a package structure with overall vibration isolation and buffering effect, in order to ensure the stability of the transmission spectrum and improve the robustness of the microcavity module. Through the performance characterization test of the device, it is proved that the packaged microcavities can maintain a quality factor as high as 10^9, and has the advantages of compact size, strong robustness, and versatility. This research work is of great significance to promote the large-scale application of WGMs in high-speed optical communication, nonlinear optics, narrow linewidth lasers, and ultra-high sensitivity sensing.

Applied Physics,Optics
Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

Ping Yu,Biao Qi,Xiaoqing Jiang,Minghua Wang,Jianyi Yang

DOI: https://doi.org/10.1364/ol.36.001314

2011-01-01

Abstract:Photonic crystal nanobeam microcavities based on slot and hollow-core waveguides were proposed and analyzed. Three-dimensional finite-difference time-domain simulations show that both an ultrasmall modal volume (V) and a high quality (Q) factor can be obtained simultaneously in hollow-core-nanobeam mirocavities (HCNMs) due to the strong confinement of fields in the two lateral directions. For a 6.5-mu m-long HCNM, the Q factor and V are on the order of 10(5) and 10(-2) (lambda/2n)(3), respectively. With compactness, lower fabrication requirements as well as ultrahigh Q/V, the proposed microcavities would be very promising in a variety of applications. (c) 2011 Optical Society of America
Ultrahigh-Q Asymmetric Microcavity Photonics on a Silicon Chip

Yun-Feng Xiao,Xue-Feng Jiang,Linbo Shao,Li Wang,Qihuang Gong

DOI: https://doi.org/10.1109/cleopr.2015.7376059

2015-01-01

Abstract:We experimentally realized on-chip deformed microcavities supporting both highly unidirectional emission and ultrahigh Q factors exceeding 10 8 . This type of microcavity holds potential in ultralow-threshold laser and sensitive nanoparticle detection.
Greater Than One Billion Q Factor for On-Chip Microresonators

Lue Wu,Heming Wang,Qifan Yang,Qing-xin Ji,Boqiang Shen,Chengying Bao,Maodong Gao,Kerry Vahala

DOI: https://doi.org/10.1364/ol.394940

IF: 3.6

2020-01-01

Optics Letters

Abstract:High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material.
Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Shuai Wan,Rui Niu,Jin-Lan Peng,Jin Li,Guang-Can Guo,Chang-Ling Zou,Chun-Hua Dong

DOI: https://doi.org/10.3788/col202220.032201

IF: 2.56

2022-01-01

Chinese Optics Letters

Abstract:The microresonator-based soliton microcomb has shown a promising future in many applications. In this work, we report the fabrication of high quality [Q) Si 3 N 4 microring resonators for soliton microcomb generation. By developing the fabrication process with crack isolation trenches and annealing, we can deposit thick stoichiometric Si 3 N 4 film of 800 nm without cracks in the central area. The highest intrinsic Q of the Si 3 N 4 microring obtained in our experiments is about 6 × 10 6 ,corresponding to a propagation loss as low as 0.058 dBm/cm. With such a high Q film, we fabricate microrings with the anomalous dispersion and demonstrate the generation of soliton microcombs with 100 mW on-chip pump power, with an optical parametric oscillation threshold of only 13.4 mW. Our Si 3 N 4 integrated chip provides an ideal platform for researches and applications of nonlinear photonics and integrated photonics.
Packaged photonic chip-based soliton microcomb using an ultralow-noise laser

Arslan S. Raja,Junqiu Liu,Nicolas Volet,Rui Ning Wang,Jijun He,Erwan Lucas,Romain Bouchand,Paul Morton,John Bowers,Tobias J. Kippenberg

DOI: https://doi.org/10.48550/arXiv.1906.03194

2019-06-04

Applied Physics

Abstract:Photonic chip-based soliton microcombs have shown rapid progress and have already been used in many system-level applications, including coherent communications, astrophysical spectrometer calibration and ultrafast ranging. While there has been substantial progress in realizing soliton microcombs that rely on compact laser diodes, culminating in devices that only utilize a semiconductor amplifier or a self-injection-locked laser as a pump source, accessing and generating single soliton states with electronically detectable line rates from a compact laser module has remained challenging. Here we demonstrate a current-initiated, $\mathrm{Si_3N_4}$ chip-based, 99-GHz soliton microcomb driven directly by an ultra-compact, low-noise laser. This approach does not require any fast laser tuning mechanism, and single soliton states can be accessed by changing the current of the laser diode. A simple, yet reliable, packaging technique has been developed to demonstrate the viability of such a microcomb system in field-deployable applications.
An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Chengli Wang,Zhiwei Fang,Ailun Yi,Bingcheng Yang,Zhe Wang,Liping Zhou,Chen Shen,Yifan Zhu,Yuan Zhou,Rui Bao,Zhongxu Li,Yang Chen,Kai Huang,Jiaxiang Zhang,Ya Cheng,Xin Ou

DOI: https://doi.org/10.48550/arXiv.2105.02533

2021-05-06

Optics

Abstract:The realization of ultrahigh quality (Q) resonators regardless of the underpinning material platforms has been a ceaseless pursuit, because the high Q resonators provide an extreme environment of storage of light to enable observations of many unconventional nonlinear optical phenomenon with high efficiencies. Here, we demonstrate an ultra-high Q factor (7.1*10^6) microresonator on the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform in which both \c{hi}^(2) and \c{hi}^(3) nonlinear processes of high efficiencies have been generated. Broadband frequency conversions, including second-, third-, fourth-harmonic generation were observed. Cascaded Raman lasing was demonstrated in the SiC microresonator for the first time to the best of our knowledge. Broadband Kerr frequency combs covering from 1300 to 1700 nm were achieved using a dispersion-engineered SiC microresonator. Our demonstration is a significant milestone in the development of SiC photonic integrated devices.
Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Jiaxin Gu,Jie Liu,Ziqi Bai,Han Wang,Xinyu Cheng,Guanyu Li,Menghua Zhang,Xinxin Li,Qi Shi,Min Xiao,Xiaoshun Jiang

DOI: https://doi.org/10.1364/prj.412840

IF: 7.6

2021-01-01

Photonics Research

Abstract:We demonstrate the fabrication of ultrahigh quality (Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma (ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94 × 10 8 from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
Silicon carbide soliton microcomb generation for narrow-grid optical communications

Jingwei Li,Ruixuan Wang,Haipeng Zheng,Zhensheng Jia,Qing Li

2024-02-29

Abstract:A soliton microcomb can play a crucial role in narrow-grid optical communications by replacing many independently operated lasers in wavelength-division multiplexing systems. In this work, we designed and demonstrated power-efficient soliton microcombs with 100-GHz free spectral range in an integrated 4H-SiC platform for the first time. The combination of enabling technologies, including efficient fiber coupling (3 dB insertion loss), high-quality-factor microrings (intrinsic quality factors up to 5.7 million), and the employment of the Raman effect for adiabatic accessing of the soliton state, has enabled the demonstration of soliton pump power as low as 6 mW while supporting comb powers above -20 dBm per line near the pump wavelength.

Optics
Towards visible soliton microcomb generation

Seung Hoon Lee,Dong Yoon Oh,Qi-Fan Yang,Boqiang Shen,Heming Wang,Ki Youl Yang,Yu-Hung Lai,Xu Yi,Xinbai Li,Kerry Vahala

DOI: https://doi.org/10.1038/s41467-017-01473-9

IF: 16.6

2017-11-03

Nature Communications

Abstract:Frequency combs have applications that extend from the ultra-violet into the mid-infrared bands. Microcombs, a miniature and often semiconductor-chip-based device, can potentially access most of these applications, but are currently more limited in spectral reach. Here, we demonstrate mode-locked silica microcombs with emission near the edge of the visible spectrum. By using both geometrical and mode-hybridization dispersion control, devices are engineered for soliton generation while also maintaining optical Q factors as high as 80 million. Electronics-bandwidth-compatible (20 GHz) soliton mode locking is achieved with low pumping powers (parametric oscillation threshold powers as low as 5.4 mW). These are the shortest wavelength soliton microcombs demonstrated to date and could be used in miniature optical clocks. The results should also extend to visible and potentially ultra-violet bands.

multidisciplinary sciences
Soliton Microwave Oscillators Using Oversized Billion Q Optical Microresonators

Lu Yao,Peng Liu,Hao-Jing Chen,Qihuang Gong,Qi-Fan Yang,Yun-Feng Xiao

DOI: https://doi.org/10.1364/optica.459130

IF: 10.4

2022-01-01

Optica

Abstract:Microresonator soliton frequency combs offer unique flexibility in synthesizing microwaves over a wide range of frequencies, while their phase noise is currently limited by thermal noise. Enlarging the mode volume would mitigate thermal noise but also raise power consumption. Here, we fabricate optical microresonators with large mode volumes by lathe machining high-purity fiber preforms. Quality factors greater than 4 billion result in a record-low threshold power of 110 µW to initiate comb operation in millimeter-sized devices. The synthesized X-band microwaves with an absolute phase noise level of − 107 ( − 133 ) d B c / H z at 1(10) kHz offset frequency feature considerable noise reduction compared to other silica-microresonator-based oscillators, which are further used to cope with high-speed data links as carrier waves. Our work illuminates a pathway toward low-noise photonic microwave generation as well as the quantum regime of soliton microcombs.
Kerr Frequency Combs in Large-Size, Ultra-High-q Toroid Microcavities with Low Repetition Rates [Invited]

Jiyang Ma,Xiaoshun Jiang,Min Xiao

DOI: https://doi.org/10.1364/prj.5.000b54

IF: 7.6

2017-01-01

Photonics Research

Abstract:By overcoming fabrication limitations, we have successfully fabricated silica toroid microcavities with both large diameter (of 1.88 mm) and ultra-high-Q factor (of 3.3×108) for the first time, to the best of our knowledge. By employing these resonators, we have further demonstrated low-threshold Kerr frequency combs on a silicon chip, which allow us to obtain a repetition rate as low as 36 GHz. Such a low repetition rate frequency comb can now be directly measured through a commercialized optical-electronic detector.
An Integrated Ultra-High-Q Resonator for Optical Clocks, Synthesizers, Gyroscopes and Spectroscopy

K. Vahala,K. Y. Yang,D. Y. Oh,S. H. Lee,X. Yi,Q. F. Yang

DOI: https://doi.org/10.1109/ipcon.2017.8116153

2017-01-01

Abstract:A microresonator having Q factors greater than 200 million and featuring a silicon-nitride integrated coupling waveguide is described. The device is a critical advance for new microcavity applications requiring integrated, ultra-high-Q and millimeter-scale cavities.
Design and Fabrication of Ultrahigh Q Chip-Based Silica WGM Micro-resonators for Single-Atom Cavity-QED

Tal Shahar Ohana,Gabriel Guendelman,Eran Mishuk,Nadav Kandel,Dror Garti,Doron Gurevich,Ora Bitton,Barak Dayan

2024-08-16

Abstract:Of the many applications of whispering-gallery mode (WGM) microresonators, Single-atom cavity-QED poses the most extreme demands on mode-volume and quality factor. Here we present a model-based procedure for the fabrication of small mode-volume ultrahigh Q silica WGM microresonators of varying geometries, from toroidal to micro-spheres. We experimentally demonstrate WGM resonators with ultra-high qualities as high as $1.7\times 10^8$ at 780nm. We present a theoretical model that allows tailoring the recipe to attain the desired geometry of the fabricated WGM microresonators.

Optics,Applied Physics,Instrumentation and Detectors
AlGaAs Soliton Microcombs at Room Temperature.

Lue Wu,Weiqiang Xie,Hao-Jing Chen,Kellan Colburn,Chao Xiang,Lin Chang,Warren Jin,Jin-Yu Liu,Yan Yu,Yoshihisa Yamamoto,John E. Bowers,Myoung-Gyun Suh,Kerry J. Vahala

DOI: https://doi.org/10.1364/ol.484552

IF: 3.6

2023-01-01

Optics Letters

Abstract:Soliton mode locking in high-Q microcavities provides a way to integrate frequency comb systems. Among material platforms, AlGaAs has one of the largest optical nonlinearity coefficients, and is advantageous for low-pump-threshold comb generation. However, AlGaAs also has a very large thermo-optic effect that destabilizes soliton formation, and femtosecond soliton pulse generation has only been possible at cryogenic temperatures. Here, soliton generation in AlGaAs microresonators at room temperature is reported for the first time, to the best of our knowledge. The destabilizing thermo-optic effect is shown to instead provide stability in the high-repetition-rate soliton regime (corresponding to a large, normalized second-order dispersion parameter D2/κ). Single soliton and soliton crystal generation with sub-milliwatt optical pump power are demonstrated. The generality of this approach is verified in a high-Q silica microtoroid where manual tuning into the soliton regime is demonstrated. Besides the advantages of large optical nonlinearity, these AlGaAs devices are natural candidates for integration with semiconductor pump lasers. Furthermore, the approach should generalize to any high-Q resonator material platform.

Ultrahigh-Q Packaged Silica Microrod Cavity for Microcomb Generation

Ultra-high-Q Microcavities Fabricated on Fused Silica Chips by Three-Dimensional Femtosecond Laser Microfabrication

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Single soliton microcombs based on optimized ultra-high Q Si3N4 optical microcavities

Integrated Ultra-High-Q Optical Resonator

Octave-spanning Soliton Microcomb in Silica Microdisk Resonators

Robust Packaged Fiber-Microcavity Device with over One Billion Q-factor

Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

Ultrahigh-Q Asymmetric Microcavity Photonics on a Silicon Chip

Greater Than One Billion Q Factor for On-Chip Microresonators

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Packaged photonic chip-based soliton microcomb using an ultralow-noise laser

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Silicon carbide soliton microcomb generation for narrow-grid optical communications

Towards visible soliton microcomb generation

Soliton Microwave Oscillators Using Oversized Billion Q Optical Microresonators

Kerr Frequency Combs in Large-Size, Ultra-High-q Toroid Microcavities with Low Repetition Rates [Invited]

An Integrated Ultra-High-Q Resonator for Optical Clocks, Synthesizers, Gyroscopes and Spectroscopy

Design and Fabrication of Ultrahigh Q Chip-Based Silica WGM Micro-resonators for Single-Atom Cavity-QED

AlGaAs Soliton Microcombs at Room Temperature.