Surface Erosion in Nc-Zrn/a-zrcu Multilayer Films after He Irradiation

V. V. Uglov,G. Abadias,S. V. Zlotski,I. A. Saladukhin,I. S. Veremei

DOI: https://doi.org/10.1016/j.surfcoat.2022.128547

2022-01-01

Abstract:The work is dedicated to the study of the phase stability and surface erosion of a novel Zr-based multilayer system consisting of a combination of ceramic (ZrN) and metallic glass (Zr-Cu) nanoscale layers after He irradiation (40 keV and doses up to 1.1 x 1018 cm(-2)). Periodic ZrN/Zr(1-x)Cux multilayers with elementary layer thicknesses of 5 nm/5 nm and 5 nm/10 nm and Cu content x = 0.45, 0.53, 0.61 and 0.74 were grown by magnetron sputter-deposition from Zr and Cu targets at the substrate temperature of 300 C. X-ray diffraction and X-ray reflectivity analysis reveal that multilayered films consist of alternating nanocrystalline (nc) ZrN and amorphous (a) ZrCu layers with relatively sharp interfaces. The stability of the phase composition of nc-ZrN/a-Zr1-xCux multilayer films to irradiation with helium ions up to fluence of 1.1 x 1018 cm- 2 has been established. For x = 0.74, crystallization of the metallic glass layer was observed. The surface integrity of the multilayer films remained unaltered up to an ion fluence of 5 x 1017 cm(-2). At higher ion fluence, surface erosion of the nc-ZrN/a-Zr(1-x)Cu(x )films occurs by the flacking mechanism. In this case, an increase in the thickness of the amorphous Zr(1-x)Cux layer and in Cu content leads to improved radiation resistance as the critical fluence for delamination increases from 5 x 1017 cm(-2) upto 8 x 1017 cm(-2).