Effect of Electrode/dielectric Interface on Energy Storage Performance of BaZr0.35Ti0.65O3 Film Capacitors

Zhongshuai Liang,Zhuo Li,Chao Li,Lilong Xiong,Xianfeng Du

DOI: https://doi.org/10.1063/5.0099817

IF: 4

2022-01-01

Applied Physics Letters

Abstract:In this work, correlative parameters of the interfacial layer adjacent to an electrode in BaZr0.35Ti0.65O3 (BZT) films, including the thickness of an interface layer (δ), the effective charge density (Neff) in a depleted layer, and other material related parameters, were evaluated. To the 145 nm-thick BZT films on different bottom electrodes, the sample with thick δ and large Neff behaved with slim P–E loops (efficiency >85.0%) and a desirable energy density of 42.1 J/cm3. While in the bulk effect dominated 300 nm-thick BZT films, a much high energy density of 83.5 J/cm3 with an efficiency of 80.5% was achieved. These suggest that the energy storage properties can be modulated through the control of the structure of the electrode/BZT interface and the film thickness.