High-Performance and Low-Power Transistors Based on Anisotropic Monolayer Β - TeO2

Shiying Guo,Hengze Qu,Wenhan Zhou,Shengyuan A. Yang,Yee Sin Ang,Jing Lu,Haibo Zeng,Shengli Zhang
DOI: https://doi.org/10.1103/physrevapplied.17.064010
IF: 4.6
2022-01-01
Physical Review Applied
Abstract:Two-dimensional (2D) semiconductors offer a promising prospect for high-performance and energyefficient devices especially in the sub-10-nm regime. Inspired by the successful fabrication of 2D /3-TeO2 and the high on:off ratio and high air stability of fabricated FETs [Zavabeti et al., Nat. Electron. 4, 277 (2021)], we provide a comprehensive investigation of the electronic structure of monolayer /3-TeO2 and the device performance of sub-10-nm MOSFETs based on this material. The anisotropic electronic structure of monolayer /3-TeO2 plays a critical role in the anisotropy of transport properties for MOSFETs. We show that the 5.2-nm gate-length n-type MOSFET holds an ultrahigh on-state current exceeding 3700 ??A/??m according to International Roadmap for Devices and Systems (IRDS) 2020 goals for highperformance devices, which is benefited by the highly anisotropic electron effective mass. Moreover, monolayer /3-TeO2 MOSFETs can fulfill the IRDS 2020 goals for both high-performance and low-power devices in terms of on-state current, subthreshold swing, delay time, and power-delay product. This study unveils monolayer /3-TeO2 as a promising candidate for ultrascaled devices in future nanoelectronics.
What problem does this paper attempt to address?