Strain-Compensated Multiquantum Well Structure Semiconductor Saturable Absorber Mirror

Lin Nan,Zhong Li,Li Haiming,Ma Xiaoyu,Xiong Cong,Liu Suping,Zhang Zhigang
DOI: https://doi.org/10.3788/cjl202249.1101002
2022-01-01
Chinese Journal of Lasers
Abstract:ObjectiveAsemiconductorsaturableabsorbermirrorSESAMhastheadvantagesofself-startingeasyintegrationwidewavelengthcoveragesupportforall-solid-statelasertechnologyfastsaturationcompactstructureandflexibledesignIthasbecomeaQ-switchedandmode-lockedelementforvarioustypesoflaserssuchassolid-statefiberandsemiconductorlasersRecentlytherapiddevelopmentofpicosecondYb-dopedfiberlasersandtheirwideapplicationinindustrialprocessinghasheightenedinterestinSESAMappliedtoYb-dopedfiberlasersHoweverdomesticresearchonSESAMdevicesismostlyfocusedonsolid-statelasersMoststudiesonSESAMforfiberlasersfocusonitsapplicationsystemandtherearefewreportsonthedevelopmentprocessofSESAMforfiberlasersandthecharacterizationofcrucialepitaxialmaterialfeaturesThusthestructuraldesignofSESAMepitaxialmaterialgrowthprocessparametersandcharacterizationofkeymaterialpropertiesreportedinthisstudyhaveimportantreferencevaluesforfurtherSESAMresearchMethodsBecausetheInGaAsquantumwelllayerdevelopedonGaAssubstrateiscompressedtheentireIn025Ga075AsGaAsmultiquantumwellMQWhasalargecompressivestrainwhichleadstothedeteriorationofthequalityofthethickInGaAsmaterialandaffectsthemode-lockingeffectofSESAMdevicesSimultaneouslythenumberofMQWcycleswillbelimitedbystrainrelaxationTwokindsofstraincompensatedInGaAsGaAsPMQWSESAMswithtotalthicknessesof150and300nmaredesignedinthisstudyThetensilestrainoftheGaAsPquantumbarrierisemployedtocompensateforthecompressivestrainofInGaAsquantumwellresultinginnotonlysuperiorepitaxialmaterialbutalsoanincreaseinthenumberofMQWcyclesTheepitaxialmaterialsaregrownbymetal-organiccompoundvapordepositionMOCVDThecharacteristicsoftheepitaxialmaterialsaredescribedusingphotoluminescencespectroscopyhigh-resolutionX-raydiffractionandaspectrophotometerThegrowthparametersofepitaxialmaterialsareoptimizedtoobtainhigh-qualityepitaxialmaterialsbasedonthecharacterizationresultsoftheepitaxialmaterialsThedevelopedSESAMisappliedtothemode-lockingexperimentofalinearcavityYb-dopedfiberlaserandastablemode-lockingpulseoutputisachievedverifyingtherationalityofthestructuredesignofSESAMandthegrowthofepitaxialmaterialsResultsandDiscussionsThephotoluminescencespectrumPLspectrumandhigh-resolutionX-raydiffractionrockingcurvesofepitaxialmaterialswithMQWandSESAMstructuresaretestedFigs2and3atroomtemperaturePLspectrumandhigh-resolutionX-raydiffractionrockingcurvetestresultsshowthattheepitaxialmaterialwith150nmInGaAsMQWstructurehastherelativelygoodmaterialqualityandinterfacemorphologyThesecond-bestMQWstructureis300nmInGaAswithanAsH3flowof40mLminduringthegrowthprocesswhiletheworstisanMQWstructurewithanAsH3flowof80mLminThemainreasonisthatthegrownGaAsPquantumbarrierstraincompensationlayercannotcompletelycompensateforthecompressivestrainofInGaAsquantumwellsresultinginacompressivenetstrainofMQWThenetstrainincreaseswithanincreaseinthequantumwellperiodthusdeterioratingthematerialqualityByreducingtheAsH3flowduringthegrowthprocessoftheGaAsPquantumbarrierthePcomponentofGaAsPcanbeeffectivelyincreasedandthestraincompensationeffectcanbeincreasedsothatthenetstrainisreducedandthematerialqualityisimprovedThereflectionspectrumtestandsimulationresultsofepitaxialmaterialswithDBRandSESAMstructuresFigs4and5showthatthetestandsimulation resultsaredeviatedbecauseofthefluctuationinthegrowthprocessofepitaxialmaterialsThereasonsforthedeviationareanalyzedTwostructuresofSESAMareappliedtoYb-dopedfiberlasersfortestingFig6andbothSESAMstructuresachievestablemode-lockingTheSESAMachievesmode-lockingatapumppowerof130mWusinganabsorptionlayerInGaAsmaterialwithatotalthicknessof150nmTheoutputpowerincreasesasthepumppowerincreasesThemode-lockedpulsewidthis 183pswhenthepumppoweris160mWandthedoublepulse phenomenonappearswhenthepumppowerincreasesto170mWTheSESAMwithatotalthicknessof300nmoftheabsorptionlayerInGaAsmaterialachievesstablemode-lockingatapumppowerof120mWandalaseroutputpowerof48mWFurthertheoutputpowerincreasesasthepumppowerincreasesTheoutputpoweris9mWwhenthepumppowerincreasesto170mWresultinginanultrafastlaserpulseoutputwithapulsewidthof96psConclusionsInthisstudytwokindsofstrain-compensatedMQWSESAMstructureswithatotalthicknessof150and300nmofInGaAsabsorberlayeraredesignedTheepitaxialmaterialofMQWandDBRisgrownbyMOCVDThefeaturesofepitaxialmaterialarecharacterizedbyphotoluminescencespectrometerhigh-resolutionX-raydiffractometerandspectrophotometeritsgrowthparametersareoptimizedbasedonthecharacterizationresultsFurtherepitaxialmaterialsofSESAMaregrownandcharacterizedusingthesametestbasedonMQWandDBRepitaxialgrowthparametersThetwoSESAMsareappliedtothelinearcavityYb-dopedfiberlaserandstablemode-lockingisachievedTheexperimentalresultsshowthatSESAMwiththethicknessoftheInGaAsabsorberlayerof300nmismorelikelytoachievestablemode-lockingandobtainpulseoutputwithnarrowpulsewidth
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