Abstract:Perfluorocompound (PFC) gases play vital roles in microelectronics processing. Requirements for ulta-high purities traditionally necessitate use of virgin sources and thereby hinder the capture, purification, and reuse of these costly gases. Most importantly, gaseous PFCs are incredibly potent greenhouse gases with atmospheric lifetimes on the order of 10 3 -10 4 years, and thus any environmental emissions have an outsized and prolonged impact on our climate. The development of sorbents that can capture PFC gases from industrial waste streams has lagged substantially behind the progress made over the last decade in capturing CO 2 from both point emission sources and directly from air. Herein, we show that the metal–organic framework Zn(fba) (fba 2– = 4,4'-(hexafluoroisopropylidene)bis-benzoate) displays an equilibrium selectivity for CF 4 adsorption over N 2 that surpasses those of all water-stable sorbents that have been reported for this separation. Selective adsorption of both CHF 3 and CH 4 over N 2 is also evident, demonstrating a general preference for tetrahedral C 1 gases. This selectivity is enabled by adsorption within narrow corrugated channels lined with ligand-based aryl rings, a site within this material that has not previously been realized as being accessible to guests. Analyses of adsorption kinetics and X-ray diffraction data are used to characterize sorption and diffusion of small adsorbates within these channels and strongly implicate rotation of the linker aryl rings as a gate that modulates transport of the C 1 gases through a crystallite. Multi-component breakthrough measurements demonstrate that Zn(fba) is able to resolve CF 4 and N 2 under flowing mixed-gas conditions. Taken together, this work illuminates a more complete picture of the dynamic structure of Zn(fba), and also points toward general design principles that can enable large CF 4 selectivities in sorbents with more favorable kinetic profiles.

HF Resistant Porous Aromatic Frameworks for Electronic Special Gases Separation.

Design of Pore Properties of an Al-Based Metal-Organic Framework for the Separation of an Ethane/Ethylene Gas Mixture Via Ethane-Selective Adsorption

Aluminum-based Metal Organic Frameworks for Greenhouse Gases CF4 and C2F6 Capture with Excellent Capacity and Selectivity

Simple Biphenyl Derived Porous Aromatic Frameworks with Attractive Xenon/krypton Separation

A Microporous Metal‐Organic Framework Supramolecularly Assembled from a CuII Dodecaborate Cluster Complex for Selective Gas Separation

Predicted Separation of Acid Gases from Gas Mixtures by Functionalized Porous Aromatic Frameworks

Deep Purification of Perfluorinated Electronic Specialty Gas with a Scalable Metal-Organic Framework Featuring Tailored Positive Potential Traps

HF-resistant perfluorinated porous polymer for separation of electronic specialty gases

Selective Adsorption of Fluorinated Super Greenhouse Gases within a Metal–Organic Framework with Dynamic Corrugated Ultramicropores

Selective Adsorption of the Super Greenhouse Gas Tetrafluoromethane within a Metal–Organic Framework with Dynamic Corrugated Ultramicropores

Polypyrene Porous Organic Framework for Efficiently Capturing Electron Specialty Gases

Separation of perfluorinated electron specialty gases on microporous carbon adsorbents with record selectivity

Porous Aromatic Frameworks Impregnated with Lithiated Fullerenes for Natural Gas Purification

Divergent Adsorption Regulation in Metal-Organic Frameworks for Highly Efficient CF4/C2F6 Separation.

Selective adsorption of SF6 in covalent- and metal–organic frameworks

High-pressure adsorption of H2S, CO2 and CH4 on porous aromatic framework (PAF-30) at different temperatures

Intramolecular Donor–Acceptor Design in Porous Organic Framework for Liquid Fuels Adsorption Desulfurization

Utilization of Cationic Microporous Metal-Organic Framework for Efficient Xe/Kr Separation

A Porous Aromatic Framework Constructed from Benzene Rings Has a High Adsorption Capacity for Perfluorooctane Sulfonate

Enhanced adsorption purification of fluoromethane electronic gas using carbon adsorbent with rich ultramicroporosity

Porous Hydrogen-Bonded Frameworks Assembled from Metal-Nucleobase Entities for Xe/Kr Separation