What problem does this paper attempt to address?

This paper aims to solve the problem of the recovery and separation of unreacted gases produced during the semiconductor manufacturing process for electronic specialty gases such as nitrogen trifluoride (\( \text{NF}_3 \)), carbon tetrafluoride (\( \text{CF}_4 \)) and sulfur hexafluoride (\( \text{SF}_6 \)). These unreacted gases not only waste precious resources but also pose a significant threat to the environment due to their extremely high global warming potential. Therefore, the efficient separation and recovery of these fluorine - containing gases (F - gases) from plasma exhaust gases are crucial for achieving the sustainable development of the semiconductor industry. However, existing adsorbents often experience a significant decline in separation performance due to structural damage when dealing with plasma exhaust gases containing trace amounts of corrosive by - products such as hydrofluoric acid (\( \text{HF} \)), which affects their long - term use. Therefore, the development of new adsorbents resistant to \( \text{HF} \) corrosion, which can remain stable in highly corrosive environments and effectively separate F - gases, is an urgent problem to be solved at present. For this purpose, the authors synthesized a perfluorinated porous polymer (PFPP - 1). This material has an extremely high specific surface area (\( S_{\text{BET}}=1068 \, \text{m}^2/\text{g} \)) and an ultra - high fluorine content (35.6 at. %), and can achieve high \( \text{HF} \) resistance and selective adsorption of F - gases. By optimizing the synthesis conditions, PFPP - 1 exhibits excellent stability under extreme conditions (such as in a 22.5 M \( \text{HF} \) solution). Meanwhile, the adsorption capacities for \( \text{SF}_6 \), \( \text{CF}_4 \) and \( \text{NF}_3 \) are 27.2, 7.9 and 7.1 cm³/g respectively, and the corresponding Ideal Adsorbed Solution Theory (IAST) selectivities (\( F - gas/N₂ = 1/9 \)) reach 41.55, 6.82 and 6.08 respectively. This indicates that PFPP - 1 has significant potential in practical applications and can effectively recover electronic specialty gases.

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