Parametric Tool Influence Function Size Optimization

Weslin C. Pullen,Tianyi Wang,Heejoo Choi,Xiaolong Ke,Lei Huang,Mourad Idir,Dae Wook Kim
DOI: https://doi.org/10.1364/freeform.2021.jtu3b.2
2021-01-01
Abstract:To further increase the efficiency of deterministic optical fabrication, a parametric Tool Influence Function optimization method was developed to assist in the optimal tool size selection process based on any given surface error map.
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