Structure and Properties of Magnetron Sputtered WCu Antibacterial Films

Wang Yingjie,Wang Lijun,Ning Pan,Liang Luoqi,Shum P.W.,Fu Tao
2022-01-01
Rare Metal Materials and Engineering
Abstract:Tungsten-copper films were prepared on slide glass by magnetron sputtering and the structure and properties of the films were studied. The results show that with the increase of copper target current, the deposition rate and copper content of the film increase, while grain size and microhardness of the film decrease. Solid solution is formed for the WCu films and Cu particles are segregated at high Cu content. WCu films have high hydrophobicity and film wettability, droplet size and ambient temperature/humidity all affect the drying time of water droplet and water film. The antibacterial tests by plate counting and spraying of bacterial suspension show that WCu films have good antibacterial activity against E. coli. WCu films are expected to be used in antimicrobial surface modification of environmental facilities.
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