Abstract:Multiplefield coupling is a typical characteristic of most mechanical structures in microelectromechanical system (MEMS), that involves the effects due to mechanical, electrostatic, magnetic, thermal actions, etc. Dynamic behaviors of the microstructures in those fields are of importance to estimate the design and manufacturing of the microsystem. In this paper, electromechanical analyses of some microstructures are presented based on a combination of boundary element method (BEM) and finite element method (FEM), to show the hybrid numerical technique not only useful to analyze the flexible deformation of the structures under electrostatic forces, but also important to evaluate the parameter variations of the electronic fields as the movement of the mechanical structures in those structronic systems. The simulation procedure is verified by both analytical solutions of some examples and experimental results of some microstructures driven by electrostatic field, in which the mechanical parameters such as the divergence of the deflection solution is related to the electrical characteristic such as the critical voltages of the electrostatic forces. Based on the structures involved in a laterally vibratory polysilicon gyroscope fabricated in our institute, the control equations of microgyroscope dynamics are presented, from that the response simulations of the microgyro are performed with the changes of the characteristic parameters, such as resonant frequency, quality factors, frequency disturbance, etc. Those results are useful for the optimal design of the structronic systems and the quality evaluation of the microprocessing, which are related to the rate measurement sensitivity and the output stability of the microsystem.

A Brief Review on the Asymptotic Methods for the Periodic Behaviour of Microelectromechanical Systems

An Efficient Analytical Approach for the Periodicity of Nano/Microelectromechanical Systems’ Oscillators

Studying nonlinear vibration analysis of nanoelectro-mechanical resonators via analytical computational method

Geometric Potential in Nano/microelectromechanical Systems: Part I Mathematical Model

Homotopy Perturbation Method for N/MEMS Oscillators

PERIODIC SOLUTION OF A MICRO-ELECTROMECHANICAL SYSTEM

Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer

Numerical bifurcation analysis of post-contact states in mathematical models of Micro-Electromechanical Systems

Variational Iteration Method for the Nanobeams-Based N/MEMS System

Nonlinear dynamic analysis of vibratory behavior of a graphene nano/microelectromechanical system

Approximate Periodic Solutions to Microelectromechanical System Oscillator Subject to Magnetostatic Excitation

MEMS Technology: A Review

A Simple Approximation of Periodic Solutions to Microelectromechanical System Model of Oscillating Parallel Plate Capacitor

Nonlinear Transient Analysis for Large-Scale Dynamics of Microelectromechanical Systems with the MOR-PIM Method

Variational iteration method for prediction of the pull-in instability condition of micro/nanoelectromechanical systems

Simulating the behavior of MEMS devices: computational methods and needs

Analysis of nonlinear vibration of nano/microelectromechanical system switch induced by electromagnetic force under zero initial conditions

Nonlinear Circuit Analysis Technique for Microelectromechanical Systems with A Time-Variant Capacitor and an Ac Power Source

Electromechanical Analysis of Microelectromechanical Structures and Dynamic Simulations of Laterally Vibratory Microgyroscope

Path following and numerical continuation methods for non-linear MEMS and NEMS