Penetration of plasma jet into porous dielectric layer: confirmed by surface charge dissipation of silicone rubber

Shuang Li,Yongqiang Fu,Xinzheng Guo,Jianjun Li,Ruobing Zhang

DOI: https://doi.org/10.1088/1361-6463/ac5557

2022-01-01

Abstract:The penetration of plasma in the porous structure is important for its application in plasma catalysis, plasma medicine, etc. In this paper, the penetration of plasma species in the porous kaolin layer was investigated. The silicone rubber was chosen as a probe and the inorganic porous dielectric layer was constructed with granular kaolin coated on the surface of silicone rubber. AC and pulsed plasma jets were applied to the silicone rubber, and the surface charge dissipation of bulk silicone rubber was measured to characterize the changes of surface property caused by the plasma penetration. The results showed that plasma could penetrate the porous dielectric layer on the silicone rubber and interact with the surface of silicone rubber, thus accelerating the surface charge dissipation of the bulk silicone rubber. The increase of shallow traps and surface conductivity after plasma treatment was the main reason for the acceleration of surface charge dissipation. The surface charge dissipation is enhanced with the increase of treatment time and the generating voltage of plasma. The surface charge dissipation declined for silicone rubber with a thicker kaolin layer due to the blocking of the kaolin layer on the interaction of plasma and the silicone rubber. For the same kind of plasma, the charge dissipation rate was linearly related to plasma dose which was represented by the energy density of plasma applied on the coated silicone rubber. At the same energy density, the surface charge dissipation of silicone rubber after pulsed plasma treatment was faster than that of AC plasma.