Origami‐Enabled Stretchable Electrodes Based on Parylene Deposition and 3D Printing

Fulvia Del Duca,Lukas Hiendlmeier,Reem Al Fata,George Al Boustani,Inola Kopic,Hu Peng,Beatrice De Chiara,Marta Nikić,Francisco Zurita,Tetsuhiko Teshima,Bernhard Wolfrum

DOI: https://doi.org/10.1002/aelm.202300308

IF: 6.2

2023-07-28

Advanced Electronic Materials

Abstract:The fabrication of stretchable conductors enabled by 3D printed origami‐inspired structures is presented. The conformal deposition of parylene‐C over 3D printed sinusoidal molds allows the fabrication of thin‐film electrodes with customizable folds and full design control over the preferred direction of stretchability. By tuning the fold steepness, the electrodes can sustain up to 100% strain. Thin film electronic devices based on flexible biocompatible substrates are desired in various fields such as implants, soft robotics, and wearables, where stretchability is often necessary. Structure‐enabled stretchability in flexible thin films can be achieved by introducing origami‐inspired folds, thereby storing excess material in the out‐of‐plane direction to unfold upon stress. When using vapor‐deposited substrates such as parylene‐C, folds can be introduced prefabrication using molds patterned in repeated grooves and ridges. Here, this work reports the fabrication and parametrization of 10‐μm‐thick stretchable origami parylene‐C electrodes using 3D printed molds. The molds are printed with a sinusoidal pattern and tunable amplitude and slope, with accurate printing results up to 60° steepness. A 160‐nm‐thick gold layer on top of the folded parylene is patterned via laser ablation following the 3D mold shape. Depending on the design parameters, the resulting electrodes maintain functionality until 40%–100% strain. By 3D printing the molds, this technique can fabricate electrodes with complete control of the designed directions of stretchability in a rapid prototyping approach.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology