Abstract:Summary form only given, as follows. Diamond films and carbon nanotubes can both be synthesized by microwave-plasma enhanced chemical vapor deposition (MECVD) technology. When a mixture of methane, nitrogen and hydrogen is used to generate the discharge, either diamond or graphite phases, or both, can be formed on the substrate. Using optical emission spectra (OES), we have found a strong correlation between the type of active species (CN and CH) and the phase of growth on the substrate. In particular, in the case of carbon nanotube growth, intensity ratio of CN and C/sub 2/ radicals was found to be closely related with morphology, microstructure and graphitization degree of the samples prepared at different CH/sub 4//N/sub 2/ ratio. Carbon nanotubes show well aligned from SEM picture at about 20% CH/sub 4/ ratio, longer in length and denser in distribution indicate high growth rate. "Nanobell" structure from TEM results is polymerized when nitrogen dominates in the mixing gas and the length and thickness of the nanobells varied with the CH/sub 4/ ratio. Raman spectra show better graphitization of sample at low CH/sub 4/ ratio and more amorphous structures form when CH/sub 4/ ratio increase. Relative concentration of CN to C/sub 2/ radicals benefits to the alignment of nanotubes and is disadvantageous to the graphitization of samples. However, in the case of diamond growth, as indicated by optical emission spectra, CH radicals play key role in the diamond phase formation process. The effect of these radicals in plasma to the formation of diamond and graphite phase is briefly discussed.

Study on the Growth Mechanism of Chlorocarbon Radicals on the Surface of CVD Diamond (100)

CCl Radicals As a Carbon Source for Diamond Thin Film Deposition.

Quantum Chemistry Model of Surface Reactions and Kinetic Model of Diamond Growth: Effects of CH3 Radicals and C2H2 Molecules at Low-Temperatures CVD

Molecular dynamics simulations of the growth of thin amorphous hydrogenated carbon films on diamond surface

Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine

Effect of CN and CH radicals on diamond and carbon nanotubes growth in MECVD

Thermodynamics Analyses of the Effect of CH 3 and C 2 H 2 on Morphology of CVD Diamond Films

Atomic-level Investigation of CHxand C2Hxadsorption on Β-Sic (111) Surface for CVD Diamond Growth from DFT Calculations

Growth of (110) diamond using pure dicarbon

Low-Temperature Growth Of Ultra-Thin Nano-Crystalline Diamond Films By Hfcvd In A Ch4/H-2 Mixture

The adsorption behaviors of Cl2 on TiC (100) surface: A density functional theory study

Thermodynamics of diamond film deposition at low pressure from chlorinated precursors

Structure Character in Small-Carbon-cluster Deposition on Diamond Surface

Probable Optimum Hydrogen Coverage of Chemical Vapor Deposited Diamond (111) Surface

Construction and Analysis of C–H–N Phase Diagram for Diamond Chemical Vapor Deposition by Simulation of Gas-Phase Chemistry

First-principles investigation of hydrogen-related reactions on (100)--(2$\times$1)$:$H diamond surfaces

A Chemical Adsorption Growth Model For Hot Filament Chemical Vapor Deposition Diamond

Thermodynamic Analyses on (111) and (100) Facets Orientation Growth of CVD Diamond Film

Calculation of phase diagram for diamond growth in C-H-Cl system

Atomic structure study of the initial stage of diamond deposition on cluster models for 6H-SiC(0001) surface