Self-Sustaining Pneumatic Micro Actuator for Large Deformation and 3D Morphology

Fade Hu,Xiayu Wang,Chuan Luo
DOI: https://doi.org/10.1109/mems51670.2022.9699600
2022-01-01
Abstract:Morphology control can enable multifunction micro devices, but the fabrication of 3D structures is challenging. This paper presents a planar fabrication compatible pneumatic actuator based on corrugation structure. The actuator exhibits large deformation and high actuation force on sub-millimeter scale. Furthermore, the deformation is self-sustainable after actuation, and the deformation morphology is programable by tuning the actuator pattern. The actuator enables a novel access to achieve 3D morphology control in micro-devices.
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