Self-referenced Interferometric Method for SLM Phase Calibration Based on Two Blazed Gratings (conference Presentation)

Liangcai Cao,Yunhui Gao,Rujia Li,Renjie Zhou
DOI: https://doi.org/10.1117/12.2543941
2020-01-01
Abstract:We propose a self-reference interferometric method for phase calibration of spatial light modulator (SLM) based on two blazed gratings. Compared with traditional methods, the proposed method yields more stable results by generating fringes with lower spatial frequency, thus making it possible for accurate, low cost measurement of the phase modulation of an SLM.
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