Abstract:Scanning electron microscopy (SEM) is a sophisticated observation instrument which is widely used to observe the surface topography of materials and study the microstructure and ingredient, it play a huge role in the research fields such as life sciences, materials science, chemistry and physics. The continuous development of scanning electron microscope technology makes it become an indispensable tool for scientific research institutions and enterprises to conduct high-tech research and routine analysis and testing. The purpose of this paper is to propose a new form of electron microscope control circuit and power drive circuit, so the scanning electron microscope can obtain higher resolution images to make up the lack of optical microscope resolution. At the same time, the new electron microscope control circuit can enhance the resolution of modern transmission electron microscope, stabilizing the accelerating voltage and the current through the lens. This paper mainly start with the working mechanism of the scanning electron microscope, analyzed the noise of the main control system and the influence of these noises on the imaging quality, and proposed measures to control noise by focusing on these three aspects: the control circuit, scanning circuit and power supply circuit, and classifies the power supply system of the control board to improve its anti-noise ability. At the same time, we use a high-speed DAC and a high-speed ADC to design scanning electron microscope high-speed scanning circuit and high-speed image data power driving circuit, and through a computer to control the control circuit and the power drive circuit. Finally, through the experimental verification, it is concluded that the design, development and system debugging of the control circuit and power drive circuit of the scanning electron microscopy are carried out. The flyback wide-voltage auxiliary power drive circuit of IRS2982S is expanded by adding a PNP triode emitter follower at each output level. The triode ZTX751 is adopted, and the index is PNP_60V_2A_200 degrees. Gain 200 levels, at least 10s of times amplification under small signal condition. The test results show that the noise of the image quality is well controlled, and the clear image of the sub-micron chip can be obtained by using the scanning electron microscope with this system.

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