Fabrication of Mie-resonant silicon nanoparticles using laser annealing for surface-enhanced fluorescence spectroscopy

Tatsuya Fukuta,Ryo Kato,Takuo Tanaka,Taka-aki Yano
DOI: https://doi.org/10.1038/s41378-024-00666-9
2024-03-28
Microsystems & Nanoengineering
Abstract:Abstract Silicon nanostructures with unique Mie resonances have garnered considerable attention in the field of nanophotonics. Here, we present a simple and efficient method for the fabrication of silicon (Si) nanoparticle substrates using continuous-wave (CW) laser annealing. The resulting silicon nanoparticles exhibit Mie resonances in the visible region, and their resonant wavelengths can be precisely controlled. Notably, laser-annealed silicon nanoparticle substrates show a 60-fold enhancement in fluorescence. This tunable and fluorescence-enhancing silicon nanoparticle platform has tremendous potential for highly sensitive fluorescence sensing and biomedical imaging applications.
nanoscience & nanotechnology,instruments & instrumentation
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