Polishing fused silica glass by incorporating ultrasonic vibration into fixed abrasive polishers

Yaguo Li,Yongbo Wu,Masakazu Fujimoto,Libo Zhou
2012-01-01
Abstract:We applied ultrasonic vibration to a recently developed fixed abrasive polisher intended for optical glass polishing. The preliminary experiments, all of which were under the conditions without aqueous addition or polishing fluid, exhibit that the material removal rate can be increased up to >50% upon the introduction of ultrasonic vibration.
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