Studying on the Experimental Method of Near-Field Thermal Radiation Based on Micro Sensors

Chong Feng,Junxing Zhang,Zhan Shi,Zhenan Tang,Jun Yu
2018-01-01
Abstract:The experimental method of near-field thermal radiation between two Silicon oxide (SiO2) plates was developed. The key work is the near-field thermal radiation (NFTR) sensor design. Firstly, the character of the near field thermal radiation between two parallel SiO2 plates was analyzed based on the electromagnetic wave theory, and the key parameter of the NFTR sensor was chosen. Secondly, according to the difference effect of the thermal radiation emitter and the thermal radiation absorber, two kinds of experimental plan were made and the NFTR sensor was designed, separately. Thirdly, the experimental model was built by the classical heat transfer theory and the micromachining process of the NFTR sensor was developed. Finally, the experimental method was extended to evaluate the near-field thermal radiation between other medium.
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