Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Laser Fabrication of Nanoholes on Silica Through Surface Window Assisted Nano-Drilling (SWAN)

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Fabrication of Nanostructures by Laser Optical Focusing

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

Nanochannels with a 18-Nm Feature Size and Ultrahigh Aspect Ratio on Silica Through Surface Assisting Material Ejection

Engraving Depth‐Controlled Nanohole Arrays on Fused Silica by Direct Short‐Pulse Laser Ablation

Dual-control of incubation effect for efficiently fabricating surface structures in fused silica

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

Investigation on Femtosecond Laser-Assisted Microfabrication in Silica Glasses

Surface Nano-fabrication by Laser Precision Engineering

Fabrication of nano-scale superhydrophobic surfaces on silicon substrates using direct laser interference patterns(DLIP)

Laser drilling of micro-holes with controllable taper using 355 nm nanosecond laser

Water-assisted Drilling of Microfluidic Chambers Inside Silica Glass with Femtosecond Laser Pulses

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

High-quality Rapid Laser Drilling of Transparent Hard Materials

Femtosecond laser micromachining and microfabrication in transparent materials

Formation of Broadband Antireflective and Superhydrophilic Subwavelength Structures on Fused Silica Using One-Step Self-Masking Reactive Ion Etching

Micro-nano fabrication of femtosecond laser wet etch

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials