Micro Polymer Micro-Blazed Grating Fabricated By Hel And Its Application On Sensing Methane Concentration

Hairong Wang,Xianni Gao,Guoliang Sun,Di Cen,Zhuangde Jiang
2009-01-01
Abstract:For methane detection, PMMA (polymethyl methacrylate) micro-blazed grating is applied to split light from infrared LED and produce light with narrow bandwidth whose center wavelength just coincides with the absorption wavelength 1.331 mu m of the methane. The PMMA grating is fabricated by HEL (Hot embossing lithography) and then deposited with a thin film of Pt for improving reflection properties. Naoimprint Lithography (NIL) is a new technique to mass replicate nanostructure by molding, and the micro-blazed grating fabricated by this process may keep geometrical feature of the mode well. A setup was designed to verify light split properties of the grating. Results indicate HEL can give good fidelity of the PMMA micro-blazed grating, and the setup can output 1.331 mu m with extremely narrow bandwidth as well. The work may not only been applied to sense concentration of methane, but also can be extend to other gas sensors.
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