Lubrication of Sliding Silicon MEMS Devices Using Ferrofluids‐based Magnetic Matrix Texture

Liu Tonggang,Muhammad Chhattal,You Kun,Lin Zili

DOI: https://doi.org/10.1049/mna2.12007

2021-01-01

Micro & Nano Letters

Abstract:This paper aims to explore the possibility of using ferrofluids for the lubrication of sliding silicon MEMS devices under the influence of different magnetic field texture configurations. For the investigation of the proposed work, a novel silicon pin-on-disk friction-pair is designed in such a way that it mimics MEMS devices and have potential to employ a magnetic field. The ferrofluids-based magnetic matrix texture was formed by placing low viscous ferrofluids on the lower specimen designed with specially arranged thin cylindrical magnets matrix. To study the lubrication performance of ferrofluids lubricated specimens, different tribological tests and surface morphology analysis was carried out using a reciprocating microtribometer and an optical microscope. The results show that the employment of the external magnetic field had facilitated the proper positioning and retention of ferrofluids on the sliding contacts and remarkably reduced the friction and wear in MEMS devices. There exists an optimal magnetic matrix texture configuration, which achieved the best tribological performance when sliding contacts lubricated with ferrofluids.