On the Performance of Gas-Lubricated Bearing-Rotor System in Microengine

Xiaoli Wang
DOI: https://doi.org/10.1088/1742-6596/660/1/012089
2015-01-01
Abstract:This paper reports a comprehensive analysis of the performance for gas-lubricated bearing-rotor system in silicon microengine. The generalized lubrication model and dynamics model are developed and the effects of micro fabrication defects, temperature and viscous friction force on both steady-state and dynamic characteristics of bearing system are investigated. The results can serve as a useful tool for the design of silicon microbearing- rotor systems.
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