Micromachined Multi-Lever Linkage Angular Motion Amplifier

Hy Lin,Mc Wu,Wl Fang,Rs Huang
2001-01-01
Abstract:The lever-mechanism is used as the linkage to connect the driving electrodes with various passive components such as mirror. The lever linkage can magnify the motion of the near-gap electrode, and accordingly reduce the driving voltage. The presented study aims to discuss various issues regarding the design of the lever linkage. In addition, the concept of using multi-lever linkage to amplify the output from an out-of-plane actuator is reported. Thus various mechanisms including the torque generator and the angular motion amplifier are developed.
What problem does this paper attempt to address?