Adsorption Of Ammonia On Si(100), (111) Surfaces - A Theoretical Approach

Rh Zhou,Pl Cao,Sb Fu
DOI: https://doi.org/10.1016/0039-6028(91)90838-j
IF: 1.9
1991-01-01
Surface Science
Abstract:The nature of the NH3 adsorption processes on Si(100)-2 x 1 and Si(111) (unreconstructed) surfaces has been studied by the DV-X-alpha and ASED-MO methods. The calculation results show that the reactivities of the two surfaces are different. On Si(100)-2 x 1 NH3 adsorbs dissociatively to the surface dangling bonds as NH2(a) and H(a) with no activation barrier, while on Si(111) it adsorbs molecularly. The further decomposition of NH2(a) on Si(100) to produce NH(a) or N(a) was found to have activation barriers of 0.8 and 1.7 eV, and the decomposition of NH3(a) on Si(111) to NH2(a) have an activation barrier of 1.6 eV. The bond geometries and electronic structures of these NH3-derived adsorbed species on both surfaces have been described in detail.
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