Abstract:Chemical vapor deposition (CVD) of transition-metal dichalcogenide (TMD) thin films, such as MoS2, on a gold (Au) surface has been regarded as one of the most promising approaches for the mass production of high-quality TMD thin films. However, the mechanism of TMD CVD growth on a gold surface remains a mystery, and many experimental observations, such as the surface chemistry during the initial stage of TMD growth and the formation of T-phase MoS2 on a Au surface, remain unclear. In this study, we systematically explored the initial stage of MoS2CVD growth on a Au(111) surface by using density functional theory-based molecular dynamics simulations. Some critical steps of MoS2 growth, such as the sulfidation of MoO3, the passivation of the Au(111) surface in the S-rich environment, and the lifting of Mo atoms from the Au substrate to form stable MoS2 nuclei, have been revealed in our atomic simulations. The theoretically predicted most stable T-phase small MoS2 clusters agree well with the previous experimental observations. Therefore, with an increase in the size of MoS2, a phase transition from the T phase to the H phase is essential for the growth of highly stable H-phase MoS2 films. This study greatly deepens our understanding of the mechanism of TMD CVD growth on a Au surface and provides guidance for the controllable CVD synthesis of various TMDs.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acs.chemmater.1c00116?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acs.chemmater.1c00116</a>.Optimized structures and formation energies of the Au(111) surface with S atom adsorption and snapshots taken during the MD trajectories of initial nucleation of MoS2 and the corresponding energy profiles (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_001.pdf">PDF</a>)Video S1 demonstrating the MD simulation of initial nucleation from S and Mo atoms (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_002.mp4">MP4</a>)Video S2 demonstrating the MD simulation of structural evolution of Mo3S7 cluster (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_003.mp4">MP4</a>)Video S3 demonstrating the MD simulation of initial nucleation from three MoS3 molecules (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_007.mp4">MP4</a>)Video S4 demonstrating the MD simulation of initial nucleation from three MoS3 molecules at higher temperature (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_008.mp4">MP4</a>)Video S5 demonstrating the MD simulation of the lifting of Mo atoms (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_004.mp4">MP4</a>)Video S6 demonstrating the MD simulation of the growth of MoS2 nucleus (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_005.mp4">MP4</a>)Video S7 demonstrating the MD simulation of the annealing of MoS2 nucleus (<a class="ext-link" href="/doi/suppl/10.1021/acs.chemmater.1c00116/suppl_file/cm1c00116_si_006.mp4">MP4</a>)This article has not yet been cited by other publications.

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