M-Wip Workstation For Rtp Monitoring And Control

J Li,Esh Hou,Mb Kaplinsky,Nj Mccaffrey,Wf Kosonocky
1996-01-01
Abstract:This paper presents the multi-wavelength imaging pyrometer (M-WIP) workstation and its application in a rapid thermal process (RTP) monitoring and control system. The integrated system consists of a host computer, a thermal imaging subsystem, a system calibration subsystem, and a feedback control subsystem. Special software tools have been developed including interactive user interface, sensor system calibration, infrared image processing, thermocouple signal processing, digital data communication, non-contact temperature measurement, and feedback process control. This system can be also used as a general purpose thermal imaging system, and it has been used to measure the response characteristics of IR-CCD cameras and the control parameters of a rapid thermal process system.
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