Numerical Investigation Of Modal Amplitude Saturation In Micromechanical Cantilever Beam Resonators

Tianyi Zhang,Zhuangde Jiang,Xueyong Wei
DOI: https://doi.org/10.1115/detc2017-67720
2017-01-01
Abstract:Micromechanical resonators have extensive applications but unavoidably exhibit nonlinearities that may degrade the devices' performances. A good understanding of their nonlinear dynamics is essential to the design of resonant devices. In this paper, we numerically investigated the dynamics of a cantilever beam resonator working at a coupled extensional and flexural vibrational modes with a 2:1 internal resonance. An amplitude saturation behavior is observed in the cantilever beam resonator by controlling the external driving force. The flexural mode shows a complex nonlinear behavior changing from a softening effect to a hardening effect and the extensional mode shows nonlinear behavior due to. the nonlinear mode coupling.
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