Application Of Large Displacement Flexure Hinge In Confocal Microscope For Scaning

Hw Ma,Sm Yao,Jb Tan
2004-01-01
Abstract:The laminated flexure hinge used in a confocal microscope for scanning features with the advantage of no friction, no lagging, high precision and larger displacement are maintained in this paper. By eliminating movement restriction in the non-principle movement direction, and applying overlap principle, the displacement of the guideway can go up to 500mum. In order to match the large displacement, a quad-edge amplifying mechanism has been designed to amplify the displacement of PZT to get high resolution drive.
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