Structural Andoptoelectronicproperties of A-Siox:Ag Films Used for Ag/SiOx/p-SiMemristor

Yanhao Gou,Wei Hou,Dongyang Li,Wenlin Meng,Yicheng Chen,Wei Li
DOI: https://doi.org/10.1088/1757-899x/250/1/012027
2017-01-01
Abstract:Silicon basedmemristorhas attracted much attention due to its potential applications not onlyinelectrical storagebut also in electro-optical modulator. No matterwhat applicationsare mentioned, the device performance is closely related to the characters of the materials used. In this paper, a-SiOx:Agthin films aredepositedon quarzsubtratesby co-sputtering, and theirmicrostructural andoptoelectronic properties are investigated by using XRD, Ramanand ellipsometry, respectively. Finally, amemristor with Ag/a-SiOx/p-Si structure is fabricated successfully, and the"ON/OFF" performanceofresistivities aremeasuredby voltammetry. The results show that a-SiOx is a potential alternate of insulator layer in the system of "Ag/insulator or semiconductor/p-Si" memristors which could be usedin optical modulators in the near future.
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