Research On Function-Oriented Feature Modeling For Micro Devices Design

Liu Yang,Jiang Pingyu,Liu Shaofeng

2006-01-01

Abstract:To realize the separation of design and fabrication processes of micro devices, and to support the integration of conceptual level, system level and device level design of micro electro-mechanical systems(MEMS), in this paper, a framework and its corresponding key technologies of function oriented feature modeling are presented on the basis of inverse design processes and "Top-Down" design methodology. In this framework, the geometric dimension and geometric constraint of the feature model is decided by corresponding bond graph represented functional components in system level simulation library, which can be used to Support space mapping among functions and structures. The solid model with features is presented by CSG and B-rep, which constructs the basis of integrating to the device level FEA or other simulation software by exchanging the solid model with some CAD data exchange standard format like IGES. Using micro gap-closing actuator as an example, the corresponding function representation of bond 'graph simulation models, device level 3D feature modeling methods and the macro script represented function/feature mapping process is demonstrated in terms of this design framework.