Abstract:With the continuous development of the field of information technology, there has been a demand for recording mark size of optical data storage, optical imaging resolving power, and characteristic linewidth of photolithography to reach nanoscale. However, it is very difficult to realize the goal due to the optical diffraction limit restrictions. Much interest has focused on the study of optical far-field super-resolution spot by using pupil filters. However, common concerns have continued to plague super-resolving pupil filters based on either scalar diffraction theory or vector diffraction theory. These concerns include the fact that the side lobe becomes non-negligible when the central lobe is squeezed to a certain extent. Moreover, it is difficult to reduce the super-resolving spot to nanoscale. In this work, we proposed a novel method to combine the super-resolving pupil filters with nonlinear saturable absorption thin films to reduce the central spot size to nanoscale, lower the intensity ratio of side lobe to central lobe, and elongate the depth of focus or tunable tolerance distance between the super-resolving spot and sample. The simulated results indicate that by using the three-zone annular binary phase filter as the super-resolving pupil filter and Sb2Te3 as the nonlinear saturable absorption thin films, the central spot size can be reduced to nanoscale, the side lobe intensity is squeezed to about 10% of the central lobe intensity, and the tunable tolerance distance between the super-resolving spot and the sample is about two times that of the depth of focus of the diffraction limited spot at the incident laser wavelength of 405nm and the numerical aperture of focusing lens of 0.95. The combination of the super-resolving pupil filters with the nonlinear saturable absorption thin films is very useful for nano-optical data storage, maskless nanolithography, and nano-optical imaging. It is also easy to use in actual applications because of the operation in the far-field range.

Super-Resolving In Telescope Imaging System With High Strehl Ratio By Two-Dimensional Polynomial Phase Pupil Filter

Super-resolution in Telescope Imaging System by Two-Dimensional Polynomial Phase Pupil Filter

A three-zone phase-only pupil filter for improving lateral resolution

Superresolving Filters with Discrete Continuous Phase Zones

Effect of Pupil Filter Position on Superresolution Properties of Confocal Measurement System

Adaptive Optics Scanning System with Two-Zone Phase Filters

Design of Super-Resolution Telescopic Imaging Optical System with Relative Large Field-of-View

Transverse Superresolution and Extended Axial Focal Depth Realized by Three-Zone Annular Phase Pupil Filter

Double Mode High-Precision Adjustable Superresolving Pupil Filter

Design of a Superresolution Large-Aperture Telescopic Optical System with a Wide Field of View

Design of Amplitude Superresolving Pupil Filter Based on Bessel Function

A Highly Efficient Superresolving Phase Filter for a Radially Polarized Beam

Aberration Effect and Optimization Design of Super-Resolution Telescope Optical System

Optimization Design of Two-zone Complex-amplitude Superresolution Pupil Filter

Discrete continuous-phase superresolving filters.

Synthetic complex superresolving pupil filter based on double-beam phase modulation.

Binary Phase-Only Pupil Filters Application to High-Aperture Confocal Microscopy

Transverse superresolution and focal shift with rotational tunable phase mask

Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films

Study on Improvement of Resolution in Photolithographic Patterns with Pupil Phase-Shift Filtering

Phase-Only Pupil Filtering Confocal Measurement System with Higher Lateral Resolution