Abstract:With the continuous development of the field of information technology, there has been a demand for recording mark size of optical data storage, optical imaging resolving power, and characteristic linewidth of photolithography to reach nanoscale. However, it is very difficult to realize the goal due to the optical diffraction limit restrictions. Much interest has focused on the study of optical far-field super-resolution spot by using pupil filters. However, common concerns have continued to plague super-resolving pupil filters based on either scalar diffraction theory or vector diffraction theory. These concerns include the fact that the side lobe becomes non-negligible when the central lobe is squeezed to a certain extent. Moreover, it is difficult to reduce the super-resolving spot to nanoscale. In this work, we proposed a novel method to combine the super-resolving pupil filters with nonlinear saturable absorption thin films to reduce the central spot size to nanoscale, lower the intensity ratio of side lobe to central lobe, and elongate the depth of focus or tunable tolerance distance between the super-resolving spot and sample. The simulated results indicate that by using the three-zone annular binary phase filter as the super-resolving pupil filter and Sb2Te3 as the nonlinear saturable absorption thin films, the central spot size can be reduced to nanoscale, the side lobe intensity is squeezed to about 10% of the central lobe intensity, and the tunable tolerance distance between the super-resolving spot and the sample is about two times that of the depth of focus of the diffraction limited spot at the incident laser wavelength of 405nm and the numerical aperture of focusing lens of 0.95. The combination of the super-resolving pupil filters with the nonlinear saturable absorption thin films is very useful for nano-optical data storage, maskless nanolithography, and nano-optical imaging. It is also easy to use in actual applications because of the operation in the far-field range.

A three-zone phase-only pupil filter for improving lateral resolution

Phase-Only Pupil Filtering Confocal Measurement System with Higher Lateral Resolution

Theoretical and Practical Guide for an Axial Superresolved Focus Via Gouy Phase Steering

Effect of Phase-Only Pupil on Lateral Resolution Property of the Defocused Confocal Microscopy System

Effect of Pupil Filter Position on Superresolution Properties of Confocal Measurement System

A lateral super-resolution differential confocal technology with phase-only pupil filter

Superresolving Filters with Discrete Continuous Phase Zones

Image Restoration Phase-Filtering Lateral Superresolution Confocal Microscopy

Tight Focusing Of A Higher-Order Radially Polarized Beam Transmitting Through Multi-Zone Binary Phase Pupil Filters

Performance improvement of super-resolving pupil filters via combination with nonlinear saturable absorption films

Optimization Design of Two-zone Complex-amplitude Superresolution Pupil Filter

Transverse Superresolution and Extended Axial Focal Depth Realized by Three-Zone Annular Phase Pupil Filter

Super-resolution in Telescope Imaging System by Two-Dimensional Polynomial Phase Pupil Filter

Approach to Higher Spatial Resolutions in a Laser Probe Measurement System Using a Phase-Only Pupil Filter

Super-Resolving In Telescope Imaging System With High Strehl Ratio By Two-Dimensional Polynomial Phase Pupil Filter

Adaptive Optics Scanning System with Two-Zone Phase Filters

Design of Amplitude Superresolving Pupil Filter Based on Bessel Function

Synthetic complex superresolving pupil filter based on double-beam phase modulation.

Double Mode High-Precision Adjustable Superresolving Pupil Filter

Binary Phase-Only Pupil Filters Application to High-Aperture Confocal Microscopy

Improvement of Axial Resolution in Confocal Microscopy by an Optical Pupil Filter with Two Zones Phase-Shifted by Π