Fabrication Of An 3d Aspherical Microlens For Oled With Pdms Modified Using A Dry Etching Process

Y. C. Chen,C. T. Pan,H. C. Wu,P. H. Lin,F. T. Hsu,W. C. Li,C. T. Pan
DOI: https://doi.org/10.1201/b15935-140
2014-01-01
Abstract:OLED (Organic Light-Emitting Diode) can enable a greater artificial contrast ratio and viewing angle compared to the LCD (liquid-crystal display) because OLED pixels light out-coupling directly. There is a shortcoming that the internal quantum efficiency can reach near to 100%, but about 80% light disperses because of the difference among the refractive indices of the substrate, anode, ITO (Indium tin oxide) film and the air, which is related to the total reflection inside the device by changing the microlens structure with substrate. In this paper, 3D A-MLAs (three dimensions aspherical microlens arrays) with substrate modifications are developed to simulate the optical luminous field and fabricate the microlens of aspherical structures by a dry etching for OLEDs. Monte Carlo method was used to investigate enhancement of the external extraction efficiency by using FRED software. This study fabricated parameters of 3D A-MLAs such as the diameter, fill-factor, aspect ratio, dry etching parameters and electroforming rates of microlens to improve the extraction efficiency of the OLED by the modified LIGA (Lithographie Galvanoformung Abformung) like process. In dry etching, an obviously enhanced aspect ratio with better extraction rate can not only be obtained by RIE (Reactive Ion Etching) dry etching, but also an undercutting phenomenon can be avoided for a 3DA-MLA. The dimensions of 3D A-MLAs can be accurately controlled in the following electroforming process used to make a Ni-Co (nickel-cobalt) metal mold as the first mold after PDMS (Polydimethylsiloxane) mold to achieve the designed dimensions. According to the measured results, the average luminance efficacy of the OLEDs with 3D A-MLAs can be enhanced.
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