Robust tracking with FPGA for high-speed laser galvanometer scanning

Kuai Yang,Zhen Zhang
DOI: https://doi.org/10.1109/3M-NANO49087.2021.9599819
2021-01-01
Abstract:A galvanometer scanner is a key component for laser beam steering/scanning thanks to its fast-response and high accuracy. In order to enhance the processing quality and efficiency of galvanometer, this paper proposes a robust control method for galvanometer scanners to reduce the tracking error in high speed processing of general patterns. A radial basis function (RBF) neural network is utilized t...
What problem does this paper attempt to address?