Experimental Research on Laser Tracking System with Galvanometer Scanner for Measuring Spatial Coordinates of Moving Target

J Wang,ZH Hu,YD Liu,JW Liang
DOI: https://doi.org/10.1117/12.402600
2000-01-01
Abstract:The spatial position of industrial object, such as robot end-effector, is an important geometric parameter whose accuracy determines whether robot can perform accurately. Therefore, we have established a laser tracking and coordinate measuring system with galvanometer scanner for high accuracy, large range, non-contact, and spatial dynamic measurement. Zn this paper, the laser tracking system and its setup are illuminated at first. Then, the formulae for calculating coordinates are deduced, and the calibration method of the initial distance from tracking mirror to target is presented. After that, two preliminary experiments in different distances are described. One is on CMM; the other is with grating ruler as reference. In the former, the maximum measurement error of coordinates is 70 mum and the maximum error of length is 35 mum in the 85x100x100mm(3) measurement volume, and in the Im initial distance. In the latter, the maximum error of length is 140 mum in the range of 480mm, and in the 5m initial distance. At the end of the paper, the error sources are analyzed and simulated.
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