Method for establishing computer-aided alignment model based on optical component surface shape

Xie Yao,Wang Liping,Jin Chunshui,Yu Jie,Wang Hui,Zhou Feng,Guo Benyin,Wang Jun
2014-01-01
Abstract:The invention discloses a method for establishing a computer-aided alignment model based on an optical component surface shape, and belongs to the field of integrating an optical system. The method comprises the steps of (1) loading a corresponding optical component surface shape in a perfect optical system which is designed by optical software and establishing a corrected optical system; (2) establishing a sensitivity matrix of the corrected optical system, carrying out singular value decomposition on the sensitivity matrix and selecting a reasonable compensator as a variable for optimizing the optical system through the analysis of a result; (3) completing the assembling of the optical system according to optimized system structure parameters, obtaining a wave aberration of an exit pupil surface through system detection, computing a misalignment rate of the optical system by combining the singular value decomposition of the sensitivity matrix of the optical system and completing system alignment. According to the method for establishing the computer-aided alignment model based on the optical component surface shape, disclosed by the invention, a coupling problem of the compensator of the optical system during a computer-aided alignment process is solved, and an iteration convergence rate of the system alignment is quickened.
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