Computer Aided Alignment of 20X Schwarzschild Projection Optics

Ke Liu,Yanqiu Li,Jingfeng Liu,Cuifang Kuang
DOI: https://doi.org/10.1117/12.819705
2008-01-01
Abstract:An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.
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