Temperature Compensation for MOEMS Micromirror with Piezoresistive Angle Sensor

Lei Qian,Huijun Yu,Jie Hu,Wenjiang Shen
DOI: https://doi.org/10.1109/NEMS51815.2021.9451299
2021-01-01
Abstract:Assuring MOEMS micromirror work with well-controlled deflection angle in varying environmental condition is of vital importance in practical application. To solve this problem, we develop an electro-magnetically driven micromirror with piezoresistive angle sensor, which is conjunct with platinum resistance temperature detector. The proposed n-type piezoresistive angle sensor is placed on the torsi...
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