METHOD FOR PRODUCING A CARBON NANOTUBE SEMICONDUCTOR DEVICE

Liang Xuelei,Hui Guanbao,Xia Jiye,Zhang Fangzhen,Zhao Haiyan,Tian Boyuan,Yan Qiuping,Peng Lianmao
2021-01-01
Abstract:The present disclosure pertains to the field of carbon nanotube technologies, and provides a carbon nanotube semiconductor device and a manufacturing method thereof. The manufacturing method of a carbon nanotube semiconductor device provided in the present disclosure comprises: forming a carbon nanotube layer with a carbon nanotube solution; and treating the carbon nanotube layer with an acidic solution. The carbon nanotube semiconductor device manufactured by the method of the present disclosure has good performance uniformity.
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