Avalanche photodiode with periodic nanostructure

江晓,张强,臧凯,马健,丁迅,霍秩杰,喻宗夫,詹姆斯S.哈里斯,潘建伟
2016-01-01
Abstract:The invention provides a silicon-based avalanche photodiode applied to single photon detection in quantum information. The silicon-based avalanche photodiode comprises an SOI substrate and a PIN structure formed on the SOI substrate. A periodic Pyramid or inverted Pyramid shaped nanostructure is formed at the outermost layer of the PIN structure as an entrance window, wherein monocrystalline silicon is employed by the nanostructure as the main body material of a Pyramid basic unit. By using the avalanche photodiode structure of the invention, the preparation of the avalanche photodiode can be carried out by using an existing silicon-based preparation process, the layer structure of the diode is simplified, while the improved time resolution ability can be provided, good detection efficiency is provided, and the avalanche photodiode is suitable for industrialized production with a large scale and a high rate of finished products.
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