Optical Homogeneity Measurement Of Parallel Plates Using Nonuniform Fast Fourier Transform Based On Low-Rank Approximation And Taylor Expansion

Renhui Guo,Chengxing Liu,Pingping Song,Zhishan Liao,Donghui Zheng,Jianxin Li,Yong He
DOI: https://doi.org/10.1117/1.OE.60.4.044102
IF: 1.3
2021-01-01
Optical Engineering
Abstract:When the optical homogeneity of parallel plates is measured using wavelength phase shifting interferometers, the nonlinearity of phase shifts caused by nonlinear wavelength tuning results in spectrum aliasing, and thus the optical homogeneity cannot be obtained accurately. We propose a nonuniform fast Fourier transform algorithm based on low-rank approximation and Taylor expansion (LRTE-NUFFT) to solve the problem. The principle of the LRTE-NUFFT method is introduced and compared with the FFT method and the nonuniform fast Fourier transform algorithm based on fast Gauss gridding (FGG-NUFFT) method proposed earlier through simulations and experiments. The results show that LRTE-NUFFT can improve the accuracy of the optical homogeneity measurement of parallel plates compared with the FFT method, and it can also improve the computational efficiency compared with the FGG-NUFFT method. (C) 2021 Society of Photo-Optical Instrumentation Engineers (SPIE)
What problem does this paper attempt to address?