Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

Neural-Network-Based Constrained Output-Feedback Control for MEMS Gyroscopes Considering Scarce Transmission Bandwidth

Neural Adaptive Control for MEMS Gyroscope with Full-State Constraints and Quantized Input.

Neural observer-based quantized output feedback control for MEMS gyroscopes with guaranteed transient performance

Neurodynamic Approximation-Based Quantized Control with Improved Transient Performances for Microelectromechanical System Gyroscopes: Theory and Experimental Results

Event-Triggered Output Feedback Control for MEMS Gyroscope with Prescribed Performance

Design and Test of MEMS Gyroscope Control System Based on LMSD

Input-and-Measurement Event-Triggered Output-Feedback Chattering Reduction Control for MEMS Gyroscopes

Noise Analysis and Modeling for a Digital Control Architecture for Lissajous Frequency-Modulated MEMS Gyroscope with Amplitude-Modulated Readout

Observer-based prescribed performance tracking control for MEMS Gyroscope subject to input saturation

Composite Neural Learning-Based Nonsingular Terminal Sliding Mode Control of MEMS Gyroscopes

Serial-Parallel Estimation Model-Based Sliding Mode Control of MEMS Gyroscopes

Adaptive control of MEMS gyroscope using global fast terminal sliding mode control and fuzzy-neural-network

Harmonic Disturbance Observer-Based Sliding Mode Control of MEMS Gyroscopes

Adaptive nonsingular terminal sliding mode control of MEMS gyroscope based on backstepping design

Adaptive global fast terminal sliding mode control of MEMS gyroscope using fuzzy-neural-network

An Electrical-Coupling-suppressing MEMS Gyroscope with Feed-Forward Coupling Compensation and Scalable Fuzzy Control

Research on Adaptive Closed-Loop Control of Microelectromechanical System Gyroscopes under Temperature Disturbance

Output-feedback asymptotic tracking control for rigid-body attitude via adaptive neural backstepping

A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

Adaptive interval type-2 fuzzy recurrent RBFNN control design using ellipsoidal membership functions with application to MEMS gyroscope

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique