Harmonic Disturbance Observer-Based Sliding Mode Control of MEMS Gyroscopes

Northwestern Polytechnical University,Wei Qi,Zhang Pengchao

DOI: https://doi.org/10.1007/s11432-019-2841-9

2021-01-01

Science China Information Sciences

Abstract:Dear editor, For micromechanical(MEMS)gyroscopes,the control per-formance is significantly reduced by the parameter uncer-tainties and the external disturbances.In view of the pa-rameter perturbations,the adaptive algorithm[1]is first ap-plied to gyroscope control.Then neural networks[2]and fuzzy logic systems[3]are utilized to relax the requirement of precise mathematical models.For the external distur-bances,the active disturbance rejection control forces the drive axis to resonate with a fixed amplitude.More stud-ies[4]focus on the disturbance observer(DOB)to achieve better tracking performance.In recent years,the extended state observer(ESO)[5]is integrated with DOB to obtain better performance.Owing to the insensitivity of environ-mental changes and external disturbances,the sliding mode control(SMC)[2,6]is employed to improve the robustness of MEMS gyroscopes.However,most DOB-based controllers focus on the system stability while ignoring the specific char-acteristics of the disturbances.